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Semiconductor Water Pattern Inspection System

  • Nextin is a global leading company in the fields of process defect detection and metrology with its proprietary technology and development of innovative ideas in semiconductor and display industries.With its superior defect detection technology and metrology solutions for its world-wide customers, Nextin is helping its users achieve early process stabilization from the initial R&D phase and maximize their profits during mass production.Nextin’s headquarters is in Dongtan, Hwasung, Korea and its Software Development Center is in the Technical Golden Triangle in Israel to provide high-quality solutions and technical support to its global customers.

  • Technology, is a combo system with dark-field and bright-field inspection capabilities, optimized for 1x nanometer nodes and beyond.Dual-Mirror Focal Plane Assembly, NEXTIN’s patented technology, parcels out the lights illuminated from 355nm high-power pulsed-laser into multiple high-performance CMOS sensors, enabling inspection of wide areas simultaneously at the maximum speed per hour.With this combo feature, AEGIS Wafer Inspection System can be used for all patterning photo & etch processes and film-related processes like CVD and CMP processes in FEOL (Front-End Of Line) and BEOL (Back-End Of Line). 


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